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Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska.

By: Material type: TextTextSeries: McGraw-Hill series in electrical engineeringPublication details: New York : McGraw-Hill, c1987.Description: xviii, 430 p. : ill. ; 25 cmISBN:
  • 0070542805 (text)
  • 0070542813 (solutions manual)
Subject(s): DDC classification:
  • 621.381/73 19
LOC classification:
  • TK 7874 .R87 1987
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Item type Current library Call number Status Barcode
Loan Margaret Thatcher Library Second Floor TK 7874.R87 1987 (Browse shelf(Opens below)) Available 10000904
Loan Margaret Thatcher Library Second Floor TK 7874.R87 1987 (Browse shelf(Opens below)) Available 10000905

Includes bibliographies and index.

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