Ruska, W. Scot <br/><br/>
Microelectronic processing :  an introduction to the manufacture of integrated circuits / 
W. Scot Ruska. 
 - New York :  McGraw-Hill,  c1987. 
 - xviii, 430 p. :  ill. ;  25 cm. 
 - McGraw-Hill series in electrical engineering .
<br/><br/>Includes bibliographies and index. 
<br/><br/><label>ISBN: </label>0070542805 (text) 0070542813 (solutions manual) 
<br/><br/><label>LCCN: </label>86015362  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction.
<br/><br/><label>LC Class. No.: </label>TK 7874  / .R87 1987 
<br/><br/><label>Dewey Class. No.: </label>621.381/73