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Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska.

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Material type: Text

TextSeries: McGraw-Hill series in electrical engineeringPublication details: New York : McGraw-Hill, c1987.Description: xviii, 430 p. : ill. ; 25 cmISBN:

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Holdings
Item type	Current library	Call number	Status	Barcode
Loan	Margaret Thatcher Library Second Floor	TK 7874.R87 1987 (Browse shelf(Opens below))	Available	10000904
Loan	Margaret Thatcher Library Second Floor	TK 7874.R87 1987 (Browse shelf(Opens below))	Available	10000905

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Previous	TK 7874.N48 The VLSI designer's library : nMOS, [lambda]=2.5 [mu], with butting contacts /	TK 7874.R8 Advanced simulation and test methodologies for VLSI sesign /	TK 7874.R87 1987 Microelectronic processing : an introduction to the manufacture of integrated circuits /	TK 7874.R87 1987 Microelectronic processing : an introduction to the manufacture of integrated circuits /	TK 7874.V47 Microelectronic system /	TK 7874.V47 Microelectronic system /	TK 7874.V6 VSLI electronics: Microstructure science /	Next

Includes bibliographies and index.

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